Nanosurf Alphacen 300

Nanosurf Alphacen 300

The tip-scanning AFM for heavy and large samples up to 300 mm

  • Standard AFM system
  •  300 mm x 300 mm sample stage
  •  Ideal for samples up to 45 kg


Introducing the Nanosurf Alphacen 300

Nanosurf is the market leader for custom developed systems for large and heavy samples. Over the past years our team has built a substantial knowledge base developing these custom stages for various customers.

Utilizing this vast body of knowledge, we have now developed a standard product for large samples up to 300 mm or heavy samples up to 45 kg. The Alphacen 300 reduces the price and the delivery time compared to a custom system.


Nanosurf Alphacen 300

Nanosurf Alphacen 300

Key Features

The tip-scanning AFM for heavy and large samples up to 300 mm

  • Standard AFM system
  • 300 mm x 300 mm sample stage
  • Ideal for samples up to 45 kg

Run automated measurement series

The Alphacen 300 includes powerful automation software that allows the user to preselect the locations of interest, either on an optical image or a stage map, and let the system collect the images with no user intervention.

Heavy glass samples

Most large sample AFMs are capable of handling planar samples up to 200 mm, typically geared toward analysis of semiconductor wafers. However, one of the limitations of these systems is the sample weight that they can handle.

Alphacen 300 addresses the need for a standard AFM capable of imaging large and heavy samples with a weight limit of up to 45 kg. The Z-stage travel of 50 mm also allows for imaging of samples that are not thin silicon wafer.

Large, heavy samples are quite commonplace in the optical industry, e.g. in the production of large lenses and semiconductor industry, e.g. assembled cassettes or completed products.

Key Benefits

Alphacen 300 imaging modes

This overview shows which modes the instrument is capable of. Some modes may require additional components or software options. For details, please contact us.

Standard imaging modes

  • Static Force Mode
  • Lateral Force Mode
  • Dynamic Force Mode (Tapping Mode)
  • Phase Imaging Mode

Thermal imaging modes

  • Scanning Thermal Microscopy (SThM)




Magnetic properties

  • Magnetic Force Microscopy

Electrical properties

  • Conductive AFM (C-AFM)
  • Piezoelectric Force Microscopy (PFM)
  • Electrostatic Force Microscopy (EFM)
  • Kelvin Probe Force Microscopy (KPFM)
  • Scanning Spreading Resistance Microscopy (SSRM)



Mechanical properties

  • Force Spectroscopy
  • Force Modulation
  • Stiffness and Modulus
  • Adhesion
  • Unfolding and Stretching
  • Force Mapping

Other measurement modes

  • Lithography and Nanomanipulation
  • Electrochemical AFM (EC-AFM)


Nanosurf Alphacen 300

Trust the Experts at Spectra Research Corporation

Spectra Research Corporation (SRC) offers a range of innovative high-quality scientific products and laboratory services to industrial and scientific markets throughout Canada.


Scan head type Tip scanner
Max. scan range (XY) 100 µm(1)
Max. Z-range 10 µm(1)
XY linearity mean error < 0.1%
XY flatness at max. scan range typ. 5 nm
Z-sensor noise-level (RMS) typ. 150 pm / max. 200 pm
Z-measurement noise level
(RMS, static mode in air)
typ. 100 pm / max. 200 pm
Z-sensor noise level
(RMS, dynamic mode in air)
typ. 25 pm / max. 35 pm
Optical detection light source 850 nm low coherence SLD
DC Detector noise < 10 pm RMS (0.1 Hz to 1 kHz)
AC Detector noise < 60 fm Hz-1/2 above 100 kHz
Detector bandwidth DC to 4 MHz
(1) Manufacturing tolerances ± 10%
Top view field of view 5 MP, 1.5 mm x 1.1 mm
Side view field of view 5 MP, 3.2 mm x 3.2 mm
Max. sample size 300 mm x 300 mm x 45 mm
Max. sample weight 40 kg
Vacuum chuck for 4’’ / 6’’ / 8’’ / 12’’ wafers
Motorized XY travel range 300 mm x 300 mm
Motorized approach range 50 mm
System dimensions 1008 mm x 1887 mm x 1208 mm (fits through 800 mm door prior to assembling the acoustic enclosure)
System weight 833 kg
Stage XY resolution < 1 µm
Unilateral repositioning accuracy 2 µm
Acoustic isolation ~30 dB above 250 Hz
Vibration isolation Active vibration isolation
High resolution outputs (DAC) 12x 28 bit, 1 MHz/sampling; thereof 4x user DAC, ±10V/3dB@200kHz
Fast outputs (DAC) 4x 16 bit, 100 MHz/sampling; thereof 1x user DAC, ±1V/3dB@10MHz
High resolution inputs (ADC) 10x 20 bit, 1 MHz/sampling; thereof 4x user ADC, ±10V/3dB@200kHz
Fast inputs (ADC) 3x 16 bit, 100 MHz/sampling; thereof 1x user ADC, ±1V/3dB@10MHz
Signal analyzer 2 signal analyzer function blocks that can be configured as dual channel lock-in
FPGA module and embedded processor System-on-chip module with low-latency FPGA signal processing at 100MHz and dual-core ARM processor, 2GB RAM, 1.5GHz clock
Scan control 28Bit X/Y/Z-DAC with ±10V/3dB@200kHz
Detector inputs Deflection/lateral signals each 16 bit/3dB@10MHz and 28 bit/3dB@200kHz
Digital sync, Spike-Guard 2-bit line/frame sync out 5 V/TTL galvanically isolated, Spike-Guard input
Clock sync 10MHz/3V clock input to synchronize data acquisition and processing
Communication to PC Gigabit Ethernet, galvanically isolated
Width min. 20 μm
Length min. 40 μm
Reflective coating Reflective coating recommended
Liquid measurements Yes, with gold coating
Alignment grooves Required by default
Special cantilever holders without alignment grooves are available
Cantilever shape Single rectangular cantilevers and multilever cantilevers (depending on scan head version and cantilever holder)
Chip thickness 300 μm, 500 μm or 600 μm depending on cantilever holder

System dimensions

Alphacen 300 system dimensions