Nano-lithography Systems

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  • TABLETOP DIRECT WRITE NANOLITHOGRAPHY & AFM

    • Detection of features buried under resist.
    • Fast exchange and calibration
    • Integrated topography sensor
    • Entry-level nanopatterning system with many unique capabilities
    • Thermal probe lithography is the fastest of all scanning probe lithography methods
    • Direct resist removal and in-situ inspection enable fast turnaround times.
    • Well-suited for academic research groups as a simple tool to easily create their own high-quality nanopatterns and devices

     

  • INDUSTRIAL-GRADE THERMAL SCANNING PROBE LITHOGRAPHY TOOL WITH MULTI-TIP WRITE HEAD

    • High-resolution
    • Thermal Scanning Probe Lithography
    • Non-invasive Lithography
    • Precise Overlay and Stitching
    • Unique Thermal Cantilevers
    • IDecapede Module
    • Laser Sublimation Module
    • Vibration Isolation
    • Low Cost of Ownership
    • Compatibility with all standard pattern transfer methods: lift-off, etching, nanoimprint lithography
    • In-situ Imaging immediate control of patterned structures

     


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Contact Spectra Research

Address

3585 Laird Rd., Unit 15 & 16,
L5L 5Z8 Mississauga
Ontario
Canada

Phone :  905-890-0555

Toll Free : 1-866-753-4433
Fax :  905-890-1959

Email: info@spectraresearch.com

About Spectra Research

Spectra Research Corporation (SRC) offers a range of innovative high-quality scientific products and laboratory services to industrial and scientific markets throughout Canada.

Established in 1993, SRC is a subsidiary of Allan Crawford Associates (ACA), one of Canada’s largest distributors of electronic components, test equipment and integrated networking solutions.

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