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The S neox Five Axis 3D Optical profiler combines a high-accuracy rotational module with the advanced inspection and analysis capabilities of the S neox 3D optical profiler. This enables automatic 3D surface measurements at defined positions which can be combined to create a complete 3D volumetric measurement.
This enables automatic 3D surface measurements at defined positions which can be combined to create a complete 3D volumetric measurement. S neox 3D measurement technologies cover a wide range of scales, including
form (Ai Focus Variation), sub nanometric roughness (Interferometry) or critical dimensions that require high lateral resolution as well as vertical resolution (Confocal).
The S neox Five Axis makes it possible to take automatic 3D surface measurements at defined positions, and combine them to create a complete 3D volumetric measurement.
S neox Five Axis is able to measure the sample at different positions of rotation and elevation (perspectives) generating a group of individual measurements. The SensoFIVE software merges all of the surfaces providing a sample surface with high accuracy by using the stacked image information of each single surface measurement. Merging different elevations, the system can provide shape and form information on sharp edges and/or critical surfaces.
Large Area 3D Optical Metrology System
Spectra Research Corporation (SRC) offers a range of innovative high-quality scientific products and laboratory services to industrial and scientific markets throughout Canada.
|Measuring principle||Confocal, PSI, ePSI, CSI, Ai Focus Variation and Thin Film|
|Observation types||Brightfield, Sequential Color RGB, Confocal, Interferential Phase Contrast|
|Camera||5Mpx: 2448×2048 pixels (60 fps)|
|Total magnification (27″ screen)||60X – 21600X|
|Display resolution||0.001 nm|
|Max. Extended measuring area||10×12 (Max. Resolution); 175×175 (Low resolution) (500 Mpx)|
|Measurement types||Image, 3D, 3D thickness, profile and coordinates|
|XY stage range||Motorized: 154×154 mm|
|LED light sources||Red (630 nm); green (530 nm); blue (460 nm) and white (575 nm; center)|
|Ring light illumination||Green ring light compatible with 6 position nosepiece|
|Sample reflectivity||0.05 % to 100%|
|Sample weight||up to 3 Kg|
|User management rights||Administrator, supervisor, advanced operator, operator|
|Optional Advanced Software Analysis||SensoMAP, SensoPRO, SensoMATCH, SensoCOMP, Geomagic®|
|Power||Line Voltage 100-240 V AC; frequency 50/60 Hz single phase|
|Computer||Latest INTEL processor; 3840×2160 pixels resolution (4K) (27”)|
|Operating system||Microsoft Windows 10, 64 bit|
|Dimensions HxWxD||945 x 635 x 610 mm (37.2 x 25.0 x 24.0 in)|
|Environment||Temperature 10 ºC to 35 ºC; Humidity <80 % RH; Altitude <2000 m|
|Weight13||77 kg (170 lbs)|
|Field of view||from 0.018 to 6.7 mm (single shot)|
|Confocal frame rate||60 fps (5Mpx); 180 fps (1.2 Mpx)|
|Vertical scan range coarse||Linear stage: 40 mm range; 5 nm resolution|
|Vertical scan range fine||Piezoelectric scanner with capacitive sensor: 200 μm range; 1.25 nm resolution|
|Max. Z measuring range||PSI 20 µm; CSI 10 mm; Confocal & Ai Focus Variation 34 mm|