TOF-SIMS instruments

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    • TRIFT mass analyzer
    • 30 kV LMIG with Bi, Au, or Ga emitter
    • Dual beam charge neutralization
    • 5 axis sample stage
    • In-situ optical viewing
    • Secondary electron detector
    • WinCadence instrument control and data reduction software package
    • Analysis chamber with four primary ion gun ports
    • 350 l/s turbo molecular pump
    • Integrated bakeout facilities
    • MS/MS ready spectromoter

     


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