Description
Announcing the latest in PHI’s line of scanning XPS microprobe instruments – the VersaProbe III. This multi-technique instrument builds on our industry-leading patented scanning microprobe technology and dual beam charge neutralization and takes it to a higher level. PHI VersaProbe III Scanning XPS Microprobe
Features of the VersaProbe III:
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Micro-Focused Scanning X-ray Source
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The core technology of the VersaProbe III is PHI’s patented, monochromatic, micro-focused, scanning x-ray source which provides excellent large area and superior micro-area spectroscopy performance. Spectroscopy, depth profiling and imaging can all be performed over the full range of x-ray beam sizes including the minimum x-ray beam size of less than 10 µm. Unique features this technology provides include:
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Large Area Spectroscopy
Turnkey Auto Analysis
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Fully Automated Unattended Analysis
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Micro Area Spectroscopy
Superior Micro Area Performance
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Sputter Depth Profiling
Optimized Configuration
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Inorganic Sputter Depth Profiling
Organic Sputter Depth Profiling
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![]() 2 keV sputter depth profile of a multi-layer PVD TiC/C coating on silicon performed using Zalar rotation to enhance layer definition. |
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2 keV sputter depth profile of a multi-layer coating on a computer hard disk performed using Zalar rotation to enhance layer definition.
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![]() 10 kV C60+ sputter depth profile of 3 nm Irganox 3114 layers in an Irganox 3110 film. |
![]() 20 kV Ar2500+ sputter depth profile of a 10 µm thick multilayer polymer film showing expected composition and layer definition. |
SmartSoft-VersaProbe
SmartSoftWhether you are a casual user or an expert, the work flow driven UI and enhanced feature set will increase your productivity.
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MultiPak Data Reduction Software
Data Reduction for XPS and AESPHI MultiPak is the most comprehensive data reduction and interpretation software package available for electron spectroscopy. The tasks of spectral peak identification, extracting chemical state information, quantification, and detection limit enhancement are addressed with an array of powerful and easy-to-use software tools for spectra, line scans, images and sputter depth profiles. MultiPak can be used on the instrument PC to process data in real time or on an off line PC for report generation. Advanced Data Reduction Tools
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Features & Accessories
Standard Features
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Optional Accessories
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