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PHI Quantes Scanning XPS/HAXPES Microprobe

  • Automated high-throughput lab-based Hard/Soft X-ray Photoelectron Spectroscopy System
  • XPS/HAXPES microprobe with ≤ 7.5 µm spatial resolution for Al X-rays and < 14 µm for Cr X-rays
  • High sensitivity electrostatic detection optics
  • Dual beam charge neutralization
  • Robotic sample handling
  • Automated 5-axis stage
  • Two internal sample parking stations
  • Accepts samples up to 100 mm diameter and 25 mm thick
  • High performance floating column Ar ion gun
  • High speed snapshot depth profiling mode
  • Multipoint depth profiling within a single crater
  • Quantitative chemical state mapping
  • Automated angle dependent profiles

 

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Introducing the PHI Quantes Scanning XPS/HAXPES Microprobe

The PHI Quantes is the only commercially available automated, high-throughput lab-based HAXPES spectrometer. It is a unique scanning X-ray photoelectron microprobe that combines a high energy (HAXPES) monochromatic X-ray source (Chromium Kα) with a conventional monochromatic soft X-ray source (Aluminum Kα). Both sources are high flux focused X-ray beams that can be scanned across the sample surface and can be used to define analysis points, areas, lines, and maps with 100% confidence.

The analytical information depth using the Cr X-ray source is about 3 times deeper than with the Al X-ray source. This opens opportunities for probing thicker film structures and buried interfaces, as well as minimizing the effects of surface contamination and ion-induced chemical damage during depth profiling.

Bring HAXPES synchrotron capabilities into your lab with the PHI Quantes!

PHI Quantes Scanning XPS/HAXPES Microprobe



PHI Quantes Scanning XPS/HAXPES Microprobe

Key Features

  • Automated high-throughput lab-based Hard/Soft X-ray Photoelectron Spectroscopy System
  • XPS/HAXPES microprobe with ≤ 7.5 µm spatial resolution for Al X-rays and < 14 µm for Cr X-rays
  • High sensitivity electrostatic detection optics
  • Dual beam charge neutralization
  • Robotic sample handling
  • Automated 5-axis stage
  • Two internal sample parking stations
  • Accepts samples up to 100 mm diameter and 25 mm thick
  • High performance floating column Ar ion gun
  • High speed snapshot depth profiling mode
  • Multipoint depth profiling within a single crater
  • Quantitative chemical state mapping

Optional Features

  • Sample Positioning Station
  • Dedicated turbopump for Ar ion gun
  • Hot/Cold introduction and stage
  • Ambient or hot/cold special platen with extra electrical contacts for in-situ electrochemical experiments
  • Auxiliary chamber for sample transfer to/from external instruments and glove boxes 
  • Dual in situ monoatomic/GCIB sputtering gun with gas cluster measurement and tuning tool
  • Glove box adapter for introduction chamber
  • Automated angle dependent profiles

 



Key Benefits

The Cr X-ray source has a photon energy of 5414.7 eV and provides for depths of analysis roughly 3 times those obtained using an Al X-ray source. This allows for:

Decreased effect of chemical state damage induced by ion sputtering

  • Using the Cr X-ray source, quantitative depth profiles can be reliably obtained from ion-beam sensitive materials.
  • Deeper sampling depth using the Cr source allows one to probe beyond the depth of possible damage induced by ion sputtering.
  • A combination of Al and Cr data in depth profiles provides information on the extent of the damage.
  • Reduced effect of surface contamination
    An example of reduced sensitivity of Cr-based spectral data to adventitious contamination is demonstrated in the Figure below where two surveys from a contaminated vanadium substrate are overlaid. The zoom-in into the C 1s binding energy region shows a much higher relative intensity in the Al X-ray data source vs the Cr X-ray survey.

Benefits of Lab-based HAXPES over Synchrotron HAXPES

  • Efficient charge neutralization for insulating and semiconducting samples
  • Fast screening tool for experiment development before time and cost intensive synchrotron beam line testing
  • Fully versatile automation of switching between Al and Cr sources (approximately 1 minute switchover time) and robust X-ray spectrometer using both soft and hard X-ray sources
  • High throughput spectrometer with all data acquisition capabilities for both X-ray sources
  • Full automation of sample manipulation and data acquisition
  • Large sample mount with 2 additional parking positions

 


PHI Quantes Scanning XPS/HAXPES Microprobe


Trust the Experts at Spectra Research Corporation

Spectra Research Corporation (SRC) offers a range of innovative high-quality scientific products and laboratory services to industrial and scientific markets throughout Canada.

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Contact Spectra Research

Address

3585 Laird Rd., Unit 15 & 16,
L5L 5Z8 Mississauga
Ontario
Canada

Phone :  905-890-0555

Toll Free : 1-866-753-4433
Fax :  905-890-1959

Email: info@spectraresearch.com

About Spectra Research

Spectra Research Corporation (SRC) offers a range of innovative high-quality scientific products and laboratory services to industrial and scientific markets throughout Canada.

Established in 1993, SRC is a subsidiary of Allan Crawford Associates (ACA), one of Canada’s largest distributors of electronic components, test equipment and integrated networking solutions.

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