905-890-0555

Herzan Spicer SC26 AC/DC Electron Microscope Instrumentation (EMI) Cancellation Systems

  • Makes the ambient magnetic field “OK” for electron beam tools in 300 mm wafer fabs
  • Real time, wideband cancelling from DC to > 9 kHz fields
  • Adapts to field amplitude and frequency changes within 10 μs
  • Touch screen intelligent user interface with automatic setup and DC reset
  • Simultaneous AC & DC field display with choice of Tesla or Gauss units
  • Mixes dual sensors to create virtual sensor “inside” the EM column
  • Built-in test field generator
  • Ethernet and USB ports for remote operation and monitoring

 

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Description

Wafer transport robots in 300mm wafer fabs. make 9 kHz fields that limit the performance of electron beam tools and are a barrier to achieving the next semiconductor CD node.The SC26 is a wide bandwidth system that can cancel magnetic fields from DC to above 9 kHz.To achieve its wide bandwidth, the SC26 uses low inductance field cancelling cables, installed in the electron beam tool enclosure.

The SC26 has inputs for two 200 kHz AC field sensors (blue) that it can mix to optimise the electron beam tool performance. These provide useful cancelling down to 10 Hz.Cancelling can be extended down to DC by adding a “Sensor SC24/DC+AC” and a sensor combiner for each input channel used.

The SC26 cannot be used with larger cables in a “room” installation like our SC24 system which operates at lower frequencies.

OVERVIEW

The Spicer Magnetic Field Cancellation System provides cost-effective, maintenance-free environmental magnetic field shielding solutions for high resolution EM (Electron Microscope) instrumentation. They are the highest-performance commercial magnetic field compensation equipment available for protecting sensitive EM instruments from AC/DC environmental magnetic fields.
 
The SC22 does not cancel DC field changes from sources such as elevators, trains and traffic. The larger SC24 system is available to cancel  both AC and DC fields.

 PRODUCT HIGHLIGHTS

  • Two separate models available (SC-22 and SC-24) for different isolation requirements
  • Use AC sensors for cancelling 50/ 60 Hz AC line fields or DC sensors for cancelling tram and train DC fields and 50/60Hz
  • Simultaneous AC & DC field display with choice of Tesla or Gauss units
  • Mixes dual sensors to create virtual sensor “inside” the EM column
  • Adapts to field changes within 100 μs
  • Touch screen intelligent user interface with automatic setup and DC reset
  • Ethernet and USB ports for remote operation and monitoring
  • Built-in test field generator
  • Offers protection against fluctuations in magnetic fields caused by:
    • Subways
    • Electrical Distribution Equipment
    • Elevators
    • Moving Vehicles
    • Can be applied to existing or new installations
 

Spicer Systems DC and AC Sensor

 

 

 APPLICATIONS

The Spicer System broadens the available installation locations for electron microscopes by allowing them to be placed in locations where varying high magnetic fields are present. As a result, they can be installed at sites that have been previously rejected due to magnetic field interference.

Common applications include:

  • Scanning Electron Microscopes
  • Transmission Electron Microscopes
  • MRI Machines
  • And more!

 

 

TEM Room with Double Loop Cables

 

 

PERFORMANCE

Spicer-System---Performance

 SEM Image - Without EMI Cancellation  SEM Image - With EMI Cancellation

 

TECHNICAL SPECIFICATIONS

Spicer-System---Technical-Specifications

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Contact Spectra Research

Address

3585 Laird Rd., Unit 15 & 16,
L5L 5Z8 Mississauga
Ontario
Canada

Phone :  905-890-0555

Toll Free : 1-866-753-4433
Fax :  905-890-1959

About Spectra Research

Spectra Research Corporation (SRC) offers a range of innovative high-quality scientific products and laboratory services to industrial and scientific markets throughout Canada.

Established in 1993, SRC is a subsidiary of Allan Crawford Associates (ACA), one of Canada’s largest distributors of electronic components, test equipment and integrated networking solutions.

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