Tabletop Micro Pattern Generator

  • Substrates up to 6“ x 6“
  • Structures down to 0.6 μm
  • Address grid down to 20 nm
  • Basic gray scale exposure mode
  • Real time auto focus system
  • Standard or UV diode laser source
  • Vector and raster exposure mode
  • Exchangeable write modes
  • Camera system for alignment



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 μPG 101 – Tabletop Micro Pattern Generator

Applications for the µPG 101 include Life ScienceMEMSSemiconductor, Sensors, Actuators, MOEMS, Material Research, Nano-Tubes, Graphene, and any other application that requires microstructures.

Contact Spectra Research


3585 Laird Rd., Unit 15 & 16,
L5L 5Z8 Mississauga

Phone :  905-890-0555

Toll Free : 1-866-753-4433
Fax :  905-890-1959

About Spectra Research

Spectra Research Corporation (SRC) offers a range of innovative high-quality scientific products and laboratory services to industrial and scientific markets throughout Canada.

Established in 1993, SRC is a subsidiary of Allan Crawford Associates (ACA), one of Canada’s largest distributors of electronic components, test equipment and integrated networking solutions.

Spectra Research Location