Auger instruments

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    • Scanned, micro-focused, monochromatic x-ray beam
    • X-ray beam induced secondary electron imaging
    • Dual beam charge neutralization
    • Large area XPS
    • Micro-area XPS
    • Chemical state imaging with 128 data channels
    • Sputter depth profiling
    • Floating column argon ion gun
    • Compucentric Zalar rotation
    • Angle dependent XPS
    • Five axis automated sample manipulator
    • 25 mm and 60 mm diameter sample holders

     

    • Cylindrical mirror analyzer (CMA)
    • Coaxial 25 kV field emission electron gun
    • Scintillation secondary electron detector
    • High energy resolution module
    • 5 axis automated sample stage
    • 5 kV floating column Ar+ ion gun
    • SmartSoft-Auger instrument control software
    • MultiPak data reduction software
    • Acoustic Enclosure
    • Ion pumped main chamber

     


Showing all 2 results