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SwissLitho Thermal Cantilevers

  • Thermal Scanning Probe cantilevers with ultra-sharp tips
  • 3D nanolithography
  • In-situ metrology with sub-nm resolution for overlay, stitching & closed-loop lithography
  • Real-time, automatic tuning of patterning parameters
  • Short overall fabrication time, no resist development needed
  • Stand-alone unit with low requirements on infrastructure (no vacuum or high voltages required)
  • High degree of customization and automatization
  • Ideal for small workpieces up to a size of 4-inch
  • Compatibility with various transfer processes and materials
  • Exchange and calibration of cantilevers within one minute

 

SKU: Thermal Cantilevers. Categories: , .
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Description

SwissLitho Thermal Cantilevers

SwissLitho Thermal Cantilevers

The thermal cantilevers are the core of the NanoFrazor, with their technology originating from the IBM Millipede project. The probes feature a heatable tip, a fast and precise electrostatic actuation mechanism allowing for 3D patterning, and an integrated topography sensor for in-situ metrology. Currently we provide High Power Cantilevers for use in the NanoFrazor Explore. Additional cantilever designs are in development in collaboration with several partners. They will enable patterning on non-conductive substrates and enhance performance through the use of tip arrays.
NanoFrazor High Power Cantilever

NanoFrazor High Power Cantilever

High Popwer Cantilever

  • Based on IBM Millipede technology
  • Ultra-sharp silicon tips
  • Two integrated micro-heaters (topography sensor & tip heater)
  • Topography sensor to measure the distance to the surface with sub-nm resolution via the heat exchange through the air
  • Fast and accurate electrostatic actuation via the work piece
  • Fabrication on full wafers keeps the costs per cantilever low
  • Easy manual cantilever exchange without additional tools

Backside Electrode Cantilever

  • Same material as High Power Cantilever
  • Enables patterning on electrically isolating substrates
  • No contacting of workpiece needed
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Close-up view of IBM Millipede Cantilever array (courtesy of IBM)

Thermal Cantilever Characteristics

Tip radius < 7 nm
Tip height 700 nm
Springconstant 0.25 N/m
Resonance frequency 100 kHz
Microheaters size 4 µm x 2 µm x 0.4 µm
Microheaters temperature range 20° – 1000 °C
Microheaters thermal time constant 6 µs
Topography sensor resolution 0.1 nm
Topography sensor bandwidth 150 kHz
Exchange and calibration of cantilevers < 1 minute.

 

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High power Cantilever mounted in cantilever holder
SwissLitho Thermal Cantilevers

Contact Spectra Research

Address

5805 Kennedy Rd
L4Z 2G3 Mississauga
Ontario
Canada

Phone :  905-890-0555

Toll Free : 1-866-753-4433
Fax :  905-890-1959

 

About Spectra Research

Spectra Research Corporation (SRC) offers a range of innovative high-quality scientific products and laboratory services to industrial and scientific markets throughout Canada.

Established in 1993, SRC is a subsidiary of Allan Crawford Associates (ACA), one of Canada’s largest distributors of electronic components, test equipment and integrated networking solutions.

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