Tabletop Micro Pattern Generator

Key Features and Options

Substrates up to 6“ x 6“
Structures down to 0.6 μm
Address grid down to 20 nm
Basic gray scale exposure mode
Real time auto focus system
Standard or UV diode laser source
Vector and raster exposure mode
Exchangeable write modes
Camera system for alignment
Multiple data input formats
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 μPG 101 – Tabletop Micro Pattern Generator

Applications for the µPG 101 include Life ScienceMEMSSemiconductor, Sensors, Actuators, MOEMS, Material Research, Nano-Tubes, Graphene, and any other application that requires microstructures.

Contact Spectra Research


5805 Kennedy Rd
L4Z 2G3 Mississauga

Phone :  905-890-0555

Toll Free : 1-866-753-4433
Fax :  905-890-1959


About Spectra Research

Spectra Research Corporation (SRC) offers a range of innovative high-quality scientific products and laboratory services to industrial and scientific markets throughout Canada.

Established in 1993, SRC is a subsidiary of Allan Crawford Associates (ACA), one of Canada’s largest distributors of electronic components, test equipment and integrated networking solutions.

Spectra Research Location