Tabletop Micro Pattern Generator

Key Features and Options

Substrates up to 6“ x 6“
Structures down to 0.6 μm
Address grid down to 20 nm
Basic gray scale exposure mode
Real time auto focus system
Standard or UV diode laser source
Vector and raster exposure mode
Exchangeable write modes
Camera system for alignment
Multiple data input formats
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 μPG 101 – Tabletop Micro Pattern Generator

Applications for the µPG 101 include Life ScienceMEMSSemiconductor, Sensors, Actuators, MOEMS, Material Research, Nano-Tubes, Graphene, and any other application that requires microstructures.