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Physical Electronics, Inc. (PHI)

Physical Electronics (PHI) is a subsidiary of ULVAC-PHI, the world’s leading supplier of UHV surface analysis instrumentation used for research and development of advanced materials in a number of high technology fields including: nanotechnology, microelectronics, storage media, bio-medical, and basic materials such as metals, polymers, and coatings. PHI’s innovative XPS, AES, and SIMS technologies provide our customers with unique tools to solve challenging materials problems and accelerate the development of new materials and products.

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    • TRIFT mass analyzer
    • 30 kV LMIG with Bi, Au, or Ga emitter
    • Dual beam charge neutralization
    • 5 axis sample stage
    • In-situ optical viewing
    • Secondary electron detector
    • WinCadence instrument control and data reduction software package
    • Analysis chamber with four primary ion gun ports
    • 350 l/s turbo molecular pump
    • Integrated bakeout facilities
    • MS/MS ready spectromoter

     

    • Cylindrical mirror analyzer (CMA)
    • Coaxial 25 kV field emission electron gun
    • Scintillation secondary electron detector
    • High energy resolution module
    • 5 axis automated sample stage
    • 5 kV floating column Ar+ ion gun
    • SmartSoft-Auger instrument control software
    • MultiPak data reduction software
    • Acoustic Enclosure
    • Ion pumped main chamber

     

    • The X-tool is designed to make XPS instrumentation accessible to a larger audience
    • An intuitive touch screen user interface
    • Automatic sample loading
    • Automatic analysis
    • Automatic report generation capability is available.

     

    • Scanned, micro-focused, monochromatic x-ray beam
    • X-ray beam induced secondary electron imaging
    • Dual beam charge neutralization
    • 128 channel mode detection
    • Large area XPS
    • Micro-area XPS
    • Chemical state imaging
    • Thin film analysis
    • Floating column argon ion gun
    • Compucentric Zalar rotation
    • Angle dependent XPS
    • Five axis automated sample manipulator
    • 75 X 75 mm sample holders
    • Two in-situ sample parking stations
    • Robotic sample handling

     

    • Scanned, micro-focused, monochromatic x-ray beam
    • X-ray beam induced secondary electron imaging
    • Dual beam charge neutralization
    • Large area XPS
    • Micro-area XPS
    • Chemical state imaging with 128 data channels
    • Sputter depth profiling
    • Floating column argon ion gun
    • Compucentric Zalar rotation
    • Angle dependent XPS
    • Five axis automated sample manipulator
    • 25 mm and 60 mm diameter sample holders

     


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